【技术】晶圆测试探针为什么要校准？

时间： 2023-05-09 来源：德普福官网

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晶圆测试探针是半导体测试探针的一种，是一种用于测试半导体晶圆的工具，它可以帮助检测晶圆的质量和性能。晶圆测试探针可以检测晶圆的尺寸、厚度、表面状态、电性能等，以确保晶圆的质量和性能。晶圆测试探针的使用可以大大提高半导体晶圆的质量，从而提高半导体产品的可靠性和可用性。本文德普福介绍晶圆测试探针为什么要校准？

在芯片设计和制造过程中，芯片未正式封装之前需要对单个晶圆进行测试。如图所示，在晶圆高频测试中，高频晶圆探针（wafer probe）是通过高频测试线连接至网络分析仪。网络分析仪在校准时，只能通过机械校准件或者电子校准件(Ecal)校准至高频测试线端口，并不能实现校准至探针针尖。

因此高频测试时引入了探针的测量误差（如下图所示）。测量误差的引入，导致了测试所得到的数据并不能反映晶圆真实的高频特性。

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本文由Vicky转载自德普福官网，原文标题为:晶圆测试探针为什么要校准？，本站所有转载文章系出于传递更多信息之目的，且明确注明来源，不希望被转载的媒体或个人可与我们联系，我们将立即进行删除处理。

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德普福（Dloorplf）射频微波信号连接产品选型指南（英文）

描述- Dloorplf is committed to providing high-quality mmWave test and measurement components that are widely utilized in the semiconductor, optical communication, and mmWave measurement industries.

型号- RCDA-TD0-XXXS/G2-9,RJ0S-0D(SMA-KM01),RCHS-SD08-XXXS-5NE,RCDA-SD0-XXXS/G2-9,RCHD-SD16-XXXS-6NE,QSFPDD-MCB-8,RCHD-SD08-XXXS-5NE,RCM7-SD16-030S-6YE,RCHS-BJ08-050S-5YC1,RCHS-SD16-XXXS-6NE,RT1.85/1.85-KK001,RCHS-SD08-050S-6YC,RJ2S-0E (2.92-KM01),RJ0S-0D,RCHD-TD16-050S-5NCX,RC4A-SD0-XXXL/E2-2,RC2A-SD0-060L/E2,RCHD-HD16-XXXS-4NEX,RC3A-SD0-XXXS/E2-2,SMA-KWT-023,RT2.4/SMP-KJ001,RT2.92/2.4-KK001,RCHD-HS08-XXXS-4NEX,101D250-500,RJ0S-1D,SMP-LD-JHD01,QSFPDD-MCB-8-GC,RCHD-HS08-XXXS-6YEX,RCHS-HD08-050S-6YC,RJKL-S08E-H4-YC,RC4A-SD0-XXXL/E2,RT2.92/2.4-JJ001,RJ2T-2E-LH,RJKL-S08E-H4-YA,1.0-KFD02-HC,RCHS-SD08-XXXS-6NE,10101D75&125,RCDA-TD0-XXXL/E2,1001D125&175,RCHD-SD08-XXXS-4NE,10101D100&150,RCHD-HS08-XXXS-5NEX,RCHS-SD16-XXXS-5NE,RCHD-TD16-XXXS-6NEX,RLTERM-J-40-20W,RC9A-MD0-XXXS/G2,1001D250&300,RCKL-SD08-050S-4Y,RJFN-W08E-H6-Y4,RJFN-W08E-H6-Y3,1.0-K-PEL,RCHS-BJ08-XXXS-6YE1,RC3A-MD0-XXXS/F2,RCHD-HS08-050S-4YCX,RCDA-SD0-XXXS/F2-3,RCDA-TD0-XXXS/F2-3,RT2.92/2.92-JJ001,RJ3S-0F(2.4-KM01）,GPPO-FD-JFD012,1001D225&275,RJ2T-2E-K01(2.92-KD01),QSFP28-MCB-8,RCHS-BJ08-050S-6YC1,RJHS-S08E-M4-N,RT2.92/2.92-KK001,RJ0S-0D-KF,RCHS-D216-XXXS-5NEX,RCHD-TD16-050S-4NCX,RJ0S-1A-H,RCKL-SD08-050S-5Y,QDD800-MCB-16,MCK SERIES,RT1.0-KK01,RCHD-SD16-XXXS-4NE,MCH SERIES,RCDA-SD0-XXXS/E2,RJHS-S08E-H4-N,RJKL-S08E-M4-YC,RCM7-SD08-XXXS-6YE,RT2.92/SMPM-JK001,RC3D-MD0-XXXH/F2,RCHS-SD08-050S-4YC,RJ2S-0E-C(2.92-KM02),RCKL-SD08-XXXS-5YA,RC4A-SD0-XXXS/E2,RJDT-2E,1001D200&250,RCHS-SD16-050S-4NC,RJ2T-0E(2.92-KWT),RCHS-D216-XXXS-4NEX,RJHS-S16E-M4-N,RCHD-HS08-XXXS-5YEX,RJ0S-0D-C,RT2.92/2.92-KFK002,RCKL-SD08-XXXS-5YE,RJHS-S08E-H4-Z,RCDA-SD0-XXXS/F2,RCM9-SW16-XXXS-9N,RT1.0-JJ01,RJ0S-0D-C(SMA-KM02),RCHS-BJ08-050S-4YC1,2.4-KM03,RCHD-HD16-050S-4NCX,RCHS-SD08-XXXS-4YE,RCHS-SD16-XXXS-4NE,RCKL-SD08-050S-5YC,101D250-1250,RCRS-SD16-030S-4N,RCKL-SD08-050S-5YA,RC3D-SD0-050H/F2,MCA SERIES,101D100-250,RCHD-SD16-050S-4NC,RC2A-SD0-XXXL/E2,OSFP-MCB-8,RCHD-TD16-050S-6NCX,RJHS-S16E-H4-N,RCDA-SD0-XXXS/G2,RCDA-SD0-XXXS/E2-2,RJRS-S08E-H4-N,RCHD-SD16-XXXS-5NE,SMA-KD02,SMA-KD01,RJHS-S16E-H4-Z,RJHS-S16E-H4-Y,10101D175&225,RCHS-SD08-050S-5YC,RCKL-SD08-XXXS-4YE,RC2A-TD0-XXXL/E2,RT1.85/1.0-KJ01,RCKL-SD08-XXXS-4YA,RC3A-TD0-XXXS/F2,DSFP-MCB-2.92,RCHD-HS08-050S-6NCX,RT1.85/HS40-KJ001,RT1.0-JK01,RT2. 4/SMPM-KJ001,RCDA-SD0-XXXL/E2-2,RJ2S-0E-M (2.92-KM03),RC2D-MD0-XXXH/E2,RCHS-SD08-XXXS-5YE,RJ0S-1D(SMA-KD01),RCKL-SD08-050S-4YC,RCKL-SD08-050S-4YA,RJ0T-2D (SMA-KWT),1001D100&150,RJKL-S08E-M4-YA,RJ0S-1D-S12(SMA-KD02),DRS04116-A0F,DRS04116-A0E,DRS04116-A0D,RC2A-SD0-060S/E2,RC9A-SD0-040S/G2,RCHD-SD16-050S-5NC,SMA-KM01,SMA-KM02,RCHS-SD08-050S-5NC,RCRS-SD08-030S-4Y,RCHD-HD16-050S-5NCX,RCKL-SD08-XXXS-5Y,RT2. 4/SMPM-JK001,RCHD-SD08-050S-5NC,RCHS-D216-050S-6NCX,RCKL-KL08-XXXS-5YEB,SMA-KFD,RCHD-TD16-XXXS-4NEX,RCHS-SD16-050S-6NC,SMA-KW6,RC2A-SD0-XXXS/E2,RJ9S-0G,RT2.92/1.85-KJ001,10/01D100-150,RCM7-SD08-050S-6NA,RJ2T-3E-SR(2.92-K),RCHS-BJ08-XXXS-4YE1,SLC70 SERIES,RCKL-SD08-XXXS-5YEB,RC2D-SD0-XXXH/E2,RT2.92/SMPM-JJ001,RCHS-SD08-XXXS-6YE,SFP28-MCB-292,RCHD-SD16-050S-6NC,GPPO-FD-JHD01,RCHS-SD08-050S-6NC,SMA-KM-Q,RT2.4/2.4-KK001,OSFP800-MCB-16,RCHD-SD08-050S-4NC,RC3D-SD0-XXXH/F2,RCHS-SD16-050S-5NC,RCHS-HD08-XXXS-6YE,RC2A-MD0-XXXL/E2,10/01D75-250,RCHD-HD16-XXXS-6NEX,RCHD-HD16-050S-6NCX,RCDA-TD0-XXXS/G2,RCKL-SD08-XXXS-4Y,RCHD-HS08-XXXS-4YEX,RT2. 4/SMPM-JJ001,RJ3T-3E-SR(2.4-KEHD01),MCA,RCHS-D216-050S-5NCX,1.85-A-GSG-XXXW,RTSMA/SMP-JK001,RCM7-SD16-050S-6NA,SMA-KWT,RJRS-S08E-H4-NC,MCH,RJ2S-1E-K(2.92-KHD02),MCK,RC2D-TD0-XXXH/E2,RC9A-SD0-XXXS/G2,RC2A-TD0-XXXS/E2,RJ2S-0E-X,RC3A-SD0-XXXS/F2,RCHD-HS08-050S-5NCX,RCDA-TD0-XXXS/F2,2.92-KM01-Q,RJHD-S16E-M4-NB,RJKL-S08E-H4-Y,GPPO-FD-JFD01,RJ3T-2F(2.4-KWT),RCHS-D216-050S-4NEX,RJRS-S16E-H4-N,DRS04210-A0C,QSFP28-MCB-8-GC,RC3D-TD0-XXXH/F2,RC4A-SD0-XXXS/E2-2,RJ2S-0E-SW,RCHS-HD08-XXXS-5YE,RT2.4/2.4-JJ001,RCHD-HS08-050S-4NCX,101D50-100,RJHD-S08E-H4-N,DRS04110-00A,RCDA-TD0-XXXS/E2,RT1.85/1.85-JK001,RT2.92/2.4-JK001,RCHD-HS08-050S-6YCX,RJKL-S08E-M4-Y,RT2.92/1.85-JJ001,RJ0T-2D,1.85/1.0-JK01,RJHD-S08E-M4-N,RCHS-HD08-050S-4YC,RC3A-SD0-050S/F2,RT2.92/1.85-KK001,RCM7-SD16-XXXS-6YE,RCHD-HD16-XXXS-5NEX,RCHS-BJ08-XXXS-5YE1,RCHS-SD08-XXXS-4NE,RCHD-HS08-050S-5YCX,RT1.85/1.85-JJ001,RCDA-TD0-XXXS/E2-2,RT2.92/2.92-JK001,RT SERIES,QSFP28-MCB-8-IL,RCHS-SD08-050S-4NC,RCHD-SD08-050S-6NC,RCHD-SD08-XXXS-6NE,RJ3S-1F-K (2.4-KM02),RC9A-TD0-XXXS/G2,RTSMA-JWK002,SLC70,RCHS-HD08-XXXS-4YE,RCM7-SD16-050S-6YE,RCHS-D216-XXXS-6NEX,DRS08106-00F,DRS08106-00E,RJHD-S16E-H4-NB,RC2D-SD0-060H/E2,RJ3T-3E-SR,RJ9S-0G-K,RCDA-TD0-XXXL/E2-2,RCHD-TD16-XXXS-5NEX,RJ0S-1D-S12,RJHS-S04E-H4-N,RCDA-SD0-XXXL/E2,RCHD-HS08-XXXS-6NEX,RCHS-HD08-050S-5YC,RT2.4/2.4-JK001,RTSMA-KFK001,RCM9-AD08-XXXS-9Y,RC2A-MD0-XXXS/E2

2024/3/16 - 德普福 - 选型指南代理服务技术支持批量订货

德普福提供SS、GS等多种型号可调间距探针，探针间距50~1000μm，频率覆盖40、50、67、110GHz

德普福可调间距探针目前提供的型号有SS、GS、SG、GSG、GSSG等，频率覆盖40GHz、50GHz、67GHz、110GHz，探针间距从50到1000μm，具有极好的可调性，可以快速满足客户不同的测试需求。

2023-05-09 - 原厂动态代理服务技术支持批量订货

Dloorplf Replacement for RF CONN

型号- RCHD-SD16-610S-4NC,RJ4S-2E,RJHD-S08E-H4-NA,RJHD-S08E-H4-NB,RCHD-TD16-610S-4NC,QSFPDD-MCB-8,RJ0T-2D-W19,2.4-K-GS-XXXW,1.85-K-GSG-XXX,RJ2T-2E,1.85-K-SG-XXXW,RCHD-TD08-305S-4NC,RJDT-2G,2.4-K-GS-XXX,RCHD-TD08-229S-4NC,RCHD-SD08-229S-4NC,2.4-K-SG-XXX,RTGPPO-KK,RJ9T-2G,RCHD-SD16-229S-4NC,RCHD-SD08-152S-4NC,RCHD-TD08-152S-4NC,1.85-K-GSG-XXXW,RJ2T-2E-W90,RCHD-SD08-610S-4NC,2.4-K-GSG-XXX,2.4-K-SG-XXXW,SFP28-MCB-292,OSFP-MCB-8,DSFP-MCB-8,2.92-K-GS-XXX,RCHD-TD16-229S-4NC,RJ4T-2E-W00,RCHD-SD16-305S-4NC,2.92-K-SG-XXX,RCHD-TD16-152S-4NC,RCHD-TD08-610S-4NC,2.92-K-SG-XXXW,1.85-K-GS-XXX,1.85-K-GS-XXXW,RJ9T-2G-W80,RCHD-SD16-152S-4NC,2.92-K-GSG-XXXW,RCHD-TD16-305S-4NC,SFPDD-MCB-8,RJHD-S16E-H4-NA,RJHD-S16E-H4-NB,1.85-K-SG-XXX,QSFP28-MCB-8,RCHD-SD08-305S-4NC,2.92-K-GSG-XXX,2.92-K-GS-XXXW,RJ0T-2D-W01,2.4-K-GSG-XXXW

Jun-2023 - 德普福 - 技术文档代理服务技术支持批量订货

Development of"Ultra-narrow pitch Hybrid Interposer substrate"for semi-conductor wafer testing probe cards

August 6,2012 - YOKOWO - 测试报告

德普福精密射频同轴转接器&射频开关矩阵选型表

提供德普福福精密射频同轴转接器RT系列和射频开关矩阵的选型，公头分为多种样式：1.85mm/2.4mm/2.92mm/SMPM/SMP/SMA/HS40/N/BNC，母头也分为多种样式：1.85mm/ 2.4mm/ 2.92mm/ SMPM/ SMP/ SMA/ N, 频率分为多种：DC-67GHz/ DC-50GHz/ DC-40GHz/ DC-26.5GHz/ DC-18GHz/ DC-4GHz，lmpedance为50Ω，Body分为两种：Stainless Steel和Stainless Steel，带法兰。频率分为多种：DC-9GHz/ DC-26.5GHz/ DC-40GHz/ DC-50GHz/ DC-67GHz，端口数量也有多种：32/40/44/64，射频接头有：SMA/ 1x8 GPPO/ 1.85/ 2.4/2.92，隔离度(dB)范围为：60~100(dB)，插入损耗(dB)范围为：0.4~3.4(dB)，驻波比范围为：1.25~2.35，切换时间为15ms，切换寿命为500万/次