MOSFET芯片薄化工艺（BGBM）

时间： 2024-05-07 来源：HI-SEMICON公众号

技术问答

选型帮助

研发客服

商务客服

晶圆减薄（一般研磨）

客户晶圆完成入站检验后，依照客户晶圆特性，与前段晶圆代工厂所生产的护层确认所需使用之胶带后，进行胶带贴附 (Taping)；接着，进行一般研磨 (Non-Taiko Grinding / Conventional Grinding)，并在完成一般研磨后，进行晶背湿蚀刻 (Backside Wet Etching)；最后，进行厚度量测 (Measurement) 后，出站检验。

案例分享（进行研磨及蚀刻后的晶圆）

研磨后的晶圆：可清楚看见研磨痕

蚀刻后的晶圆：表面己粗化

应用范围

· 适用八寸、六寸、P型 / N型晶圆

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本文由出山转载自HI-SEMICON公众号，原文标题为:MOSFET 芯片薄化工艺 (BGBM)，本站所有转载文章系出于传递更多信息之目的，且明确注明来源，不希望被转载的媒体或个人可与我们联系，我们将立即进行删除处理。

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PD行业应用分享

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HI-SEMICON（深鸿盛)是一家专业的半导体功率器件设计公司，专注于半导体功率器件的设计、制造、技术服务与销售。公司拥有多项技术知识产权，是广东省实验室重任务快速响应项目和广东省重点领域研发计划合作单位，为客户提供高性能、高品质、高稳定性的半导体功率器件。

低压MOS 中低压功率MOSFETs 高压功率MOSFETs 超结MOSFETs 肖特基二极管超快恢复二极管碳化硅肖特基二极管超快恢复整流二极管多层外延超结MOS 中低压SGT MOS 碳化硅MOS管 IGBT

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HI-SEMICON 产品充电桩行业分享

型号- SCP65R090CF,SFS3401,SC3D40065D,SC3D40120D,SFS3400,SC3D40065I,SC3D40065H,SC3D15120H,SC3D40065G,SGP104R5T,SFS2N7002,SFS3407,SC3D10120H,SCW65R075CF,S3M040120K3,SCW65R050CF,SFD3009T,SGA104R5T,SC3D40065A,SFA10015T,SFS2301,SC3D30065I,SFS3415,SCW65R090CF,SC3D30065G,SFD50N06,SC3D30065H,SC3D30120H,SGD105R5T,SGP104R0T,SC3D30065D,SC3D30120D,SC3D30065A,SFD6008T,SCW65R041CF,S3M075120K3,SC3D20065I,SC3D20065H,SC3D20120H,SC3D20065A,SGA105R5T,SGA104R0T,SC3D20065D,SC3D20065G,SC3D20120D

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目录- 中低压功率MOSFETs 高压功率MOSFETs 超结MOSFETs

型号- SFU6007T,SFP20N65,SCF60R190C,SFD3006T,SFD6003T,SGP104R5T,SFF10N65R,SFD7N70,SFF4N60E,SFQ0320T4,SFM4009T,SFE6001T2,SFP20N60,SFK2N50,SFF60N06,SFM041R8T,SFD60N06,SFD2N50,SFP4N65,SFP33N10,SFP4N65E,SCP60R190C,SFP20N70,SFS3401,SFD4N60E,SFS3400,SFD6005T,SFD7N65E-Y,SFD7N50,SFM6005ST,SFF18N50,SCA60R280C,SFM4N65,SFD1N65,SCP70R360C6,SFD3015T,SGA855R0T,SFP50N06,SCA65R540T,SCF65R640C,SFQ0322T4,SFU4N65E,SFF12N65,SFD6006T,SFD6N70,SGM10HR14T,SFQ0420T4,SGM062R3T,SFS4525T,SFD3N50-P,SFN3009T,SCD60R360C,SFF6N70,SFU3006T,SCF65R1K15C,SFP9N20,SFF50N06,SFD6007T,SFF3N50-P,SFP10N60,SCF65R380C,SFP7N65E-Y,SCP65R380C,SCP60R280C,SFS4008T2,SFS2300,SFF7N65-Y,SCF60R280C,SFF13N50,SFF7N50,SCF65R540T,SFD50N06,SFP10N70,SCD65R1K2C,SFM4010T,SFD3N50TS,SFF6007T,SCF80R500C,SCD80R500C,SFF2N50,SFD3012T,SFA3018T,SFF7N65,SCF65R310C,SFF7N65E-Y,SCD70R360C6,SFF6006T,SCK65R1K15C,SFD4N65E,SFF15N10,SFU4N65,SFF7N70,SFD4003T,SFU9N65,SFF6005T,SFD7N65-Y,SCP60R160C,SCA60R190C,SCF80R950C,SFK3N50,SCF55R2K7C,SFF12N65-Y,SFE3007T,SFP3006T,SFD5N50,SGM6005DT,SFF9N20,SGF15N10,SFP60N06,SFS2N10,SCF70R600C6,SFD4001PT5,SFP10N65-Y,SFF3N50,SFM4N65E,SCD65R125C,SCF65R125C,SFD4N70,SFP7N65-Y,SFF5N50TS,SFP6005T,SCP65R125C,SGM031R1T,SCF70R420C,SCD70R420C,SFP12N65-Y,SCP65R540T,SCF60R160C,SFD4N65,SFS2N7002,SFF3N50TS,SFF33N10,SCF70R360C6,SFS2302B,SFS2301B,SFD15N10,SFF20N60,SFD6003PT,SGA104R5T,SFF20N65,SFS4606T,SFU4003T,SGD15N10,SFF9N50,SFD10N65-J,SFF4N65E,SFD4004PT,SFD9N65,SFF20N70,SFU10N65R,SCD55R2K7C,SFU6003T,SFF10N70,SCF60R360C,SFD2006T,SFF9N65,SFP13N50,SCD70R600C6,SFU7N70,SCD65R380C,SFD5N50TS,SFAP4580,SFF10N60,SCD65R540T,SCP60R360C,SFF4N65,SFM0320T4,SCF65R1K2C,SCP80R500C,SGP855R0T,SFU6005T,SFD10N65R,SFD3N50,SFP12N65,SFU6N70,SFU4N60E,SFF4N70,SFF10N65-Y,SFF9N90,SGU15N10,SFM3011T,SFF16N65,SFP110N55,SFU6006T,SFP18N50,SFU15N10,SFF5N50,SFF10N65-J,SFN6004T5,SFP59N10,SFD9N20,SCF65R240C,SCD65R640C,SFM3012T,SFS5N10S,SFN0250T2,SCD65R1K15C

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RDS(on)[typ] (@4.5V) (Ω)

选型表 - HI-SEMICON 立即选型

HI-SEMICON 产品电机行业分享

型号- SGX10HR10T,SGM066R5T,SGM105R0T,SFN3009T,SGM031R7T,SGP104R5T,SFN3003T,MUR1660T,SGM109R5T,SFN3002PT,SFN3003PT,SFD6003PT,SGM041R8T,SFP6008T,SCX65R380C,SFD6005PT,SGM042R1T,SFN4006T5,SGP105R5T,SCF65R640C,MUR1560T,SCF65R540T,SGM107R7T,SC3D08060A,SFS4010T,SGM031R1T,SFDP12N65,SCF65R240C,SFN4009T,SFM3012T,SGM041R3T

数据手册 - HI-SEMICON - 2023/8/21 PDF 中文下载