晶圆表面污染及其检测方法

2024-10-27 SMC(桑德斯微电子公众号)
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晶圆表面洁净度会极大的影响后续半导体工艺及产品的合格率。在所有产额损失中,高达50%是源自于晶圆表面污染。


能够导致器件电气性能或器件制造过程发生不受控制的变化的物体统称为污染物。污染物可能来自晶圆本身、洁净室、工艺工具、工艺化学品或水。晶圆污染一般可以通过肉眼观察、过程检查、或是最终器件测试中使用复杂的分析设备检测到。

▲硅晶圆表面的污染物 | 图源网络

污染分析的结果可用于反映晶圆在某一工艺步骤、特定机台或是整体工艺中所遭遇的污染程度与种类。根据检测方法分类,可将晶圆表面污染分为以下几种。


金属污染

由金属造成的污染,可导致不同程度的半导体器件缺陷。

 

碱金属或碱土金属(Li、Na、K、Ca、Mg、Ba等)会造成p-n结构中的漏电流,进而导致氧化物的击穿电压;过渡金属与重金属(Fe、Cr、Ni、Cu、Au、Mn、Pb等)污染可使载流子生命周期的减少,降低元件使用寿命或使元件工作时暗电流增大。


检测金属污染的常用方法是全反射X射线荧光、原子吸收光谱法和电感耦合等离子体质谱法 (ICP-MS)。

▲晶圆表面污染 | ResearchGate

金属污染可能来自于清洁、刻蚀、光刻、沉积等过程中所使用的试剂,或是工艺中所使用的机台,如烘箱、反应器、离子注入等,亦有可能是对晶圆处理方式不慎所导致。


颗粒污染

实际的材料沉积物,通常通过检测从表面缺陷散射的光来观察到的污染,因此颗粒污染更准确的学名是亮点缺陷 (light-point defect)。颗粒污染可能导致在蚀刻及微影工艺中,产生阻塞 (blocking) 或遮蔽 (masking) 的效应。


在薄膜成长或沉积过程中,产生针孔 (pinholes) 和微孔 (microvoids),若粒子颗粒较大且具有导电性,甚至会导致线路短路。

▲颗粒污染的形成 | 图源网络

微小的颗粒污染会导致表面出现阴影,例如在光刻过程中。如果大颗粒位于光掩模和光刻胶层之间,则它们会降低接触曝光的分辨率。


此外,它们还可以在离子注入或干蚀期间阻挡加速离子。颗粒也可能被薄膜封闭,这样就有凹凸不平。随后沉积的层可能会在这些位置开裂或抵抗积累,从而在暴露过程中引起问题。


有机污染

含有碳的污染物,以及与C相关的键合结构,称为有机污染。有机污染物可能会导致晶圆表面产生非预期的疏水性质、增加表面的粗糙度、产生雾化表面、破坏外延层的生长,且在未先移除污染物的情况下,也会影响金属污染的清洗效果。


一般用热脱附MS、X射线光电子能谱和俄歇电子能谱等仪器检测此类表面污染。

▲图源网络

气态污染和水分污染

具有分子尺寸的大气分子和水分污染,通常无法使用普通高效颗粒空气 (HEPA) 或超低渗透空气过滤器 (ULPA) 去除。此类污染通常通过离子质谱和毛细管电泳进行监测。

 

有些污染物可能属于多个类别,例如颗粒可能由有机或金属材料组成,或者同时包含两者,因此这类污染也可能被归类为其它类型。

▲气态分子污染物 | IONICON

此外,按照污染源尺寸,也可以将晶圆污染分类为分子污染、颗粒污染和工艺衍生碎片污染。污染颗粒尺寸越小,去除难度越高。在当今电子元器件的制造中,晶圆清洁程序占到整个生产过程步骤的30% - 40%。

▲硅晶圆表面的污染物 | 图源网络

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本文由ll转载自SMC(桑德斯微电子公众号),原文标题为:科普 | 晶圆表面污染及其检测方法,本站所有转载文章系出于传递更多信息之目的,且明确注明来源,不希望被转载的媒体或个人可与我们联系,我们将立即进行删除处理。

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型号- 1N4755A,1N4731A,1N4743A,BZV55C13,BZV55C12,BZV55C11,BZT52B7V5,BZV55C10,BZV55C16,MMBZ5246B,BZV55C15,MMBZ5258B,MMBZ5222B,MMBZ5234B,BZV55C18,MMSZ5258B,BZX84C22,MM3Z7V5,BZT52B6V2S,BZX84C20,MMSZ5222B,MMSZ5234B,MMSZ5246B,DL5250B,BZX84C27,DL5262B,DL4728A,BZX84C24,BZT52C9V1,BZV55C20,DL4729A,1N4742A,1N4754A,BZV55C24,1N4730A,BZV55C22,MM5Z3V9,MMBZ5259B,BZV55C27,MMBZ5235B,BZV55C5V1,MMBZ5247B,MMBZ5223B,MM5Z3V0,BZX84C33,BZV55C5V6,MMSZ5259B,MM5Z3V3,BZX84C30,MMSZ5223B,MM5Z3V6,MMSZ5235B,DL5263B,BZX84C39,DL5251B,BZX84C36,BZX55C8V2,BZT52B5V6S,1N4733A,1N4745A,BZT52B6V2,BZT52B6V8,MMBZ5244B,MM3Z6V8,MMBZ5256B,BZV55C100,MMBZ5232B,MMSZ5236B,MMSZ5248B,1SMA4752-GT3,DL5260B,1N5280B,1SMA4760-GT3,1N4746A,1N4758A,DL4738A,BZT52C7V5S,BZT52C8V2,1N4744A,BZT52C8V2S,1N4756A,BZT52C6V8S,1N4732A,MMBZ5257B,MMBZ5245B,BZV55C4V3,MMBZ5221B,BZX84C10,MMSZ5225B,BZX84C11,BZV55C4V7,MMSZ5237B,MM5Z2V4,MM5Z2V7,BZX84C18,DL5261B,BZX84C16,BZX55C9V1,BZX84C15,BZX84C12,1N4757A,DL4739A,BZX84C13,BZT52B9V1,1N5270B,MMBZ5226B,MMSZ5241B,BZT52C5V6S,MM3Z9V1,BZT52B5V1S,MMSZ5254B,1N4748A,DL4748A,DL4736A,1N4736A,1N4734A,1N5281B,BZX55C6V2,MMBZ5239B,MM5Z5V6,MMBZ5227B,MMSZ5230B,MMSZ5242B,BZT52C6V2S,1SMA4759-GT3,BZV55C7V5,MM5Z5V1,MMSZ5243B,MMSZ5255B,BZX55C6V8,1N4759A,DL4737A,1SMA4745-GT3,1N4735A,1N4747A,DL4749A,1N5272B,BZT52B8V2,1N5260B,1SMA4751-GT3,MMBZ5248B,MMBZ5236B,MMSZ5231B,1SMA4744-GT3,MM3Z8V2,1SMA4761-GT3,MMSZ5232B,MMSZ5256B,DL4746A,DL4734A,1N4738A,DL4758A,BZT52B3V9S,1N5271B,MMBZ5237B,MM5Z4V7,MMBZ5225B,BZV55C6V2,BZV55C6V8,MMSZ5221B,MM5Z4V3,MMSZ5245B,MMSZ5257B,DL4735A,1N4737A,DL4759A,1N4749A,DL4747A,BZX55C7V5,BZT52B4V7S,1N5250B,ZMM5260B,1N5262B,1N5274B,MMBZ5250B,BZX84C9V1,BZT52B3V3S,DL4744A,DL4732A,1N4728A,DL4756A,1N5261B,1N5273B,ZMM5261B,MM5Z7V5,1SMA4746-GT3,BZT52C5V1S,BZV55C9V1,MMBZ5251B,DL4733A,1N4739A,DL4757A,DL4745A,BZT52B2V7S,BZV55C75,1N5240B,1N5276B,1N5252B,1N5264B,ZM4728A,BZT52C4V7S,DL4742A,DL4730A,DL4754A,1N5225,BZV55C82,1N5227,1N5226,1N5229,BZT52C3V9S,1N5228,1N5251B,1SMA4754-GT3,1N5263B,1N5275B,ZM4729A,MM5Z6V8,BZV55C8V2,BZT52B3V6S,BZT52B4V3S,MM5Z6V2,1N5230,DL4731A,1N5232,DL4755A,1N5231,DL4743A,1N5234,1N5233,1N4729A,1N5236,1N5235,1N5238,BZV55C91,1N5237,1N5239,BZV55C51,1N5254B,1N5266B,BZV55C56,1N5230B,1N5242B,1N5278B,MMBZ5242B,BZT52C2V7S,MMBZ5254B,MMBZ5230B,BZX84C7V5,MMSZ5226B,DL4740A,1N5241,DL4764A,1N5240,DL4752A,1N5243,1N5242,1N5245,1N5244,1N5247,1N5246,1N5249,1N5248,1SMA4747-GT3,BZV55C62,1N5265B,BZV55C68,1N5277B,1N5241B,1N5253B,BZT52C18S,BZT52C3V3S,MMBZ5255B,MMBZ5231B,MMBZ5243B,MMSZ5227B,MMSZ5239B,1N5250,MM5Z9V1,1N5252,DL4753A,BZT52B3V0S,1N5251,DL4741A,MM5Z75,1N5254,1N5253,1N5256,1N5255,1N5258,1N5257,1N5259,BZV55C30,1N5232B,1N5244B,BZV55C33,BZV55C39,BZT52C4V3S,1N5256B,1N5268B,BZV55C36,BZT52C3V6S,MMBZ5240B,MMBZ5252B,BZX84C8V2,MMSZ5228B,1N5261,DL4762A,1N5260,DL4750A,1N5263,1N5262,1N5265,1N5264,1N5267,BZT52B2V4S,1N5266,1N5243B,1N5255B,1N5231B,BZV55C43,1N5267B,1N5279B,BZV55C47,MMBZ5241B,DL4751A,MM5Z8V2,1SMA4753-GT3,DL4763A,MMSZ5229B,1SMA4756-GT3,BZX55C188,BZX55C27,ZM4758A,1N5222B,ZM4746A,ZM4734A,1N5258B,BZT52C39S,BZT52B18S,BZX55C24,1N5234B,1N5246B,BZX55C180,BZX55C20,BZT52C27S,1SMA4748-GT3,BZT52C15S,BZX55C22,BZX84C5V6,DL4760A,MM5Z47,MM3Z18V,BZX84C5V1,1SMA4764-GT3,ZMM5244B,ZMM5256B,ZMM5232B,MM5Z43,1N5221B,BZX55C16,ZM4747A,1N5233B,ZM4735A,BZX55C18,1N5269B,BZX55C12,BZX55C13,1N5245B,1N5257B,BZX55C15,ZM4759A,BZT52C14S,BZX55C10,BZX55C11,MM5Z39,MM5Z36,DL4761A,ZMM5257B,MM5Z30,ZMM5233B,ZMM5245B,ZMM5221B,MM5Z33,ZM4732A,BZX55C160,ZM4756A,ZM4744A,1N5236B,BZT52C17S,1N5248B,BZX55C47,1N5224B,DL5229B,BZX55C43,BZX84C6V8,BZT52B43,BZX55C51,BZX84C6V2,MM5Z62,MM5Z68,ZMM5242B,ZMM5254B,ZMM5230B,BZX55C150,BZX55C39,ZM4757A,ZM4745A,ZM4733A,BZT52C2V4S,1N5247B,BZT52C28S,1N5259B,1N5223B,BZX55C36,1N5235B,BZX55C30,BZT52C16S,BZX55C33,MM5Z51,ZMM5255B,1SMA4741-GT3,ZMM5231B,MM5Z56,ZMM5243B,DL5227B,BZT52C11S,1N5226B,BZX55C68,ZM4738A,BZT52C47S,DL5239B,1N5238B,1SMA4755-GT3,BZX84C3V9,BZX84C3V6,BZX84C3V3,BZX84C3V0,ZMM5240B,ZMM5252B,BZT52C10S,BZT52B13S,BZT52C22S,BZT52C3V6,BZT52C3V9,1N5225B,BZX55C56,BZT52C3V0,1N5237B,ZM4739A,BZT52C3V3,DL5228B,1N5249B,1SMA4750-GT3,BZX55C62,MM3Z15V,ZMM5253B,ZMM5241B,DL5225B,ZMM5250B,DL5249B,DL5237B,ZM4736A,ZM4748A,BZT52C13S,BZT52B16S,1N5228B,BZX84C4V7,MM5Z27,BZX84C4V3,BZX55C91,MM3Z16V,MM5Z20,MM5Z24,MM5Z22,ZMM5262B,BZT52C12S,DL5238B,BZT52C2V7,DL5226B,ZM4749A,ZM4737A,BZT52C36S,BZT52B15S,BZT52C2V4,BZT52C24S,BZX55C75,BZT52B39S,1N5227B,BZT52B27S,1N5239B,MM5Z16,BZX55C82,1SMA4749-GT3,MM5Z15,MM5Z18,MM5Z13,MM5Z12,MM5Z11,ZMM5251B,MM5Z10,ZMM5263B,BZT52C43S,BZT52B22S,BZT52B3V6,DL5247B,BZT52B10S,DL5235B,BZX55C100,DL5259B,1SMA4760,ZM4762A,1SMA4761,1SMA4762,DL5223B,1SMA4763,BZT52B3V9,BZV55C160,1SMA4764,BZT52B3V3,MM3Z10V,BZT52B3V0,BZT52B9V1S,MM3Z22V,ZMM5228B,ZM4750A,BZT52B33S,DL5236B,BZT52C5V6,DL5224B,ZM4763A,BZX55C4V3,DL5248B,1SMA4762-GT3,ZM4751A,BZT52C30S,BZV55C150,MMSZ5250B,BZT52C18,BZT52C5V1,1N5229B,BZT52C10,BZT52C11,MM3Z11V,BZT52C12,BZT52C13,ZMM5229B,BZT52C15,BZT52C16,1SMA4758-GT3,BZX55C4V7,BZT52B2V7,1SMA4743-GT3,DL5257B,BZT52B24S,BZT52C33S,BZT52B12S,DL5221B,BZV55C180,MMBZ5228B,DL5245B,1SMA

选型指南  -  SMC  - 2016/3/2 PDF 英文 下载

测试报告  -  SMC  - 08-31-2023 PDF 英文 下载

桑德斯(SMC)桥式整流器选型指南

目录- Bridge Rectifiers   

型号- GBU1006,UG4KB10,UG4KB100,GBU1004,GBU1002,MB10S,GBU1001,KBP2005G,MB6F,MB10F,DF156,DF157,DF154,DF155,MB6S,DF152,DF151S,DF153,DF151,GBPC3510,DF07,DF06,FTB2F-15,DF05,DF04,DF03,DB107S,DF02,GBU4005,DF01,SM2S,RMB6S,GBU408G,DB151S,UG4KB20,FTB4F-15,DF150S,ABS8,KBP204G,ABS6,DF158S,SM1S,ABS4,ABS2,MB8F,ABS10,DF1510S,GBJ25005,FTB6F-15F,MB8S,GBJ2510,DB105S,FTB6F-15,DB157S,SM4S,MB05S,GBU1010,GBU406G,UG4KB40,GBU410G,GBJ2502,GBJ2504,GBPC35005,GBJ2501,MB05F,DB106S,DF156S,KBP206G,FTB8F-15,GBJ2506,KBP210G,GBJ2508,GBU1008,GBU4005G,DB154S,GBPC2508,FTB4F-15F,FTB10F-15,GBPC2501,GBPC2502,MB2F,GBPC2506,GBPC2504,SM6S,MB2S,FTB1F-15,DB103S,DB155S,FTB10F-15F,GBU404G,MB1F,GBPC2510,UG4KB60,RMB2S,KBP208G,MB1S,DB156S,DB104S,DF154S,FTB1F-15F,GBU10005,DB152S,MB4F,GBU410,GBU401G,SM10S,GBU406,GBU408,SM8S,MB4S,DB101S,KBP201G,DB153S,RMB4S,SM05S,GBPC3508,FTB8F-15F,UG4KB05,GBPC3502,UG4KB80,GBU401,FTB2F-15F,GBPC3501,GBU402G,GBPC25005,GBPC3506,GBU402,GBPC3504,GBU404,DB102S,DF152S,KBP202G

选型指南  -  SMC  - 2016/3/2 PDF 英文 下载

桑德斯(SMC)肖特基芯片选型指南

目录- Schottky chip   

型号- SD110SB60A/B,SD200SC200A/B/C,SD035SE30A/B,SD121SC150A/B/C,SD072SD15A/B,SD055SB45A/B,SD070SD15A/B,SD035SD15A/B,SD200SD15A/B/C,SD070SC100A/B,SD098SB45A/B,SD200SA45A/B/C,SD055SC100A/B,SD091SA80A/B,SD200SE45A/B/C,SD071SC150A/B,SD070SE30A/B,SD072SE30A/B,SD090SC150A/B/C,SD090SC100A/B/C,SD110SN100A,SD170SA80A,SD070SN150A,SD170SC100A/B,SD055SA60A/B,SD090SA30A/BC,SD071SN150A/B,SD055SN100A/B,SD200SA60A/B/C,SD040SD15A/B,SD125SD15A/B/C,SD170SN100A,SD060SA60A/B,SD067SA45A/B,SD275SC150A/B/C,SD088SD15A/B/C,SD175SC150A/B/C,SD088SB60A/B,SD121SA45A/B,SD067SB60A/B,SD275SE30A/B/C,SD121SC100A/B/C,SD275SA30A/B/C,SD067SE30A/B,SD071SN100A,SD088SA80A/B,SD121SE30A/B,SD060SC200A/B,SD170SE45A/B,SD035SA45A/B,SD067SN150A,SD125SA60A/B/C,SD098SC100A/B,SD072SC200A/B,SD175SC100A/B/C,SD098SA60A/B,SD055SA30A/B,SD110SA45A/B,SD175SN100A,SD085SD15A/B/C,SD045SC150A/B,SD275SC100A/B/C,SD040SA30A/B,SD170SA60A/B,SD090SE30A/B/C,SD040SC100A/B,SD070SB45A/B,SD067SA30A/B,SD072SB45A/B,SD175SB45A/B/C,SD090SA45A/B/C,SD110SD15A/B,SD070SA80A/B,SD067SC150A/B,SD110SC150A/B/C,SD121SA30A/B,SD175SE45A/B/C,SD121SN100A,SD275SB60A/B/C,SD070SA45A/B,SD175SE30A/B/C,SD125SB60A/B/C,SD045SA45A/B,SD070SA30A/B,SD060SN100A,SD060SE45A/B,SD035SE45A/B,SD071SA60A/B,SD088SA60A/B,SD088SN100 A/B,SD040SB45A/B,SD085SA30A/BC,SD090SB60A/B/C,SD275SA45A/B/C,SD045SD15A/B,SD071SC100A/B,SD110SA30A/B,SD125SE45A/B/C,SD067SB45A/B,SD071SE45A/B,SD072SA30A/B,SD040SE30A/B,SD175SA60A/B/C,SD125SE30A/B/C,SD110SC200A/B,SD071SC200A/B,SD125SC100A/B/C,SD121SD15A/B,SD055SC150A/B,SD040SC150A/B,SD121SB45A/B,SD090SD15A/B/C,SD085SA60A/B,SD040SA45A/B,SD067SC100A/B,SD060SB60A/B,SD071SB60A/B,SD090SN100A,SD050SC100A//B,SD035SB60A/B,SD067SD15A/B,SD045SB45A/B,SD170SC150A/B/C,SD275SD15A/B/C,SD071SD15A/B,SD098SA45A/B,SD055SC200A/B,SD200SC100A/B/C,SD070SC200A/B,SD110SB45A/B,SD200SE30A/B/C,SD200SB45A/B/C,SD098SB60A/B,SD071SE30A/B,SD200SA30A/B/C,SD110SC100A/B,SD125SN100A,SD098SE30A/B/C,SD121SA60A/B,SD175SC200A/B/C,SD040SE45A/B,SD110SA60A/B,SD170SA30A/B,SD067SN100A,SD275SC200A/B/C,SD045SA30A/B,SD055SE45A/B,SD060SE30A/B,SD072SE45A/B,SD085SB60A/B,SD125SB45A/B/C,SD200SC150A/B/C,SD045SE30A/B,SD110SE30A/B/C,SD121SC200A/B/C,SD175SB60A/B/C,SD035SA60A/B,SD098SE45A/B,SD088SB45A/B,SD035SC200A/B,SD070SC150A/B,SD067SC200A/B,SD040SB60A/B,SD170SB45A/B,SD060SA45A/B,SD045SC100A//B,SD170SD15A/B,SD070SN100A,SD088SA30A/BC,SD072SN150A,SD170SC200A/B,SD055SB60A/B,SD072SA60A/B,SD071SA45A/B,SD050SD15A/B,SD055SD15A/B,SD072SC100A/B,SD067SE45A/B,SD055SE30A/B,SD175SD15A/B/C,SD040SA60A/B,SD071SB45A/B,SD090SB45A/B/C,SD170SE30A/B/C,SD040SC200A/B,SD072SB60A/B,SD091SN150A,SD175SA45A/B/C,SD071SA80A/B,SD125SC150A/B/C,SD121SE45A/B,SD170SA45A/B,SD275SA60A/B/C,SD035SC100A/B,SD175SA30A/B/C,SD072SN100A/B,SD090SE45A/B/C,SD070SB60A/B,SD085SA45A/B,SD170SB60A/B,SD060SD15A/B,SD085SE45A/B/C,SD072SA45A/B,SD035SB45A/B,SD045SB60A/B,SD072SC150A/B,SD091SC150A/B/C,SD275SB45A/B/C,SD085SB45A/B,SD125SA45A/B/C,SD275SE45A/B/C,SD070SE45A/B,SD060SB45A/B,SD088SE45A/B/C,SD085SE30A/B/C,SD98SD15A/B,SD071SA30A/B,SD110SE45A/B,SD088SE30A/B/C,SD125SA80A/B,SD060SC100A/B,SD125SC200A/B/C,SD125SA30A/B/C,SD098SA30A/B,SD121SB60A/B,SD045SC200A/B,SD067SA60A/B,SD035SC150A/B,SD045SN100A,SD090SC200A/B/C,SD055SA45A/B,SD060SA30A/B,SD045SA60A/B,SD200SB60A/B/C,SD060SC150A/B,SD091SC200A/B,SD045SE45A/B,SD035SA30A/B,SD088SA45A/B,SD070SA60A/B,SD090SA60A/B/C

选型指南  -  SMC  - 2016/3/3 PDF 英文 下载

SMC‐Q SERIES

型号- SMC-060303Q-3N5□,SMC-100505Q-4N7S,SMC-201209Q- R12□,SMC-060303Q-2N8□,SMC-160808Q-R33□,SMC-060303Q-0N6□,SMC-060303Q-1N3□,SMC-201209Q-4N7□,SMC-060303Q-2N0□,SMC-100505Q-SERIES,SMC-201209Q- SERIES,SMC-060303Q-SERIES,SMC-201209Q-1N8□,SMC-201209Q-1N0□,SMC-100505Q-2N4S,SMC-201209Q-10N□,SMC-201209Q-56N□,SMC-160808Q-R18□,SMC-160808Q-82N□,SMC-100505Q-39N□,SMC-201209Q-33N□,SMC-060303Q-2N7□,SMC-160808Q-R10□,SMC-160808Q-R22□,SMC-060303Q-5N6□,SMC-060303Q-3N4□,SMC-060303Q-1N2□,SMC-201209Q-8N2□,SMC-201209Q-3N9□,SMC-201209Q-6N8□,SMC-160808Q-33N□,SMC-160808Q-56N□,SMC-100505Q-1N0S,SMC-160808Q-18N□,SMC-201209Q-22N□,SMC-201209Q-68N□,SMC-060303Q-R12□,SMC-100505Q-27N□,SMC-100505Q-R12□,SMC-100505Q-1N8S,SMC-160808Q-10N□,SMC-201209Q-SERIES,SMC-060303Q-5N1□,SMC-100505Q-47N□,SMC-060303Q-0N8□,SMC-060303Q-3N7□,SMC-160808Q-R43□,SMC-060303Q-2N2□,SMC-100505Q-43N□,SMC-060303Q-1N5□,SMC-100505Q-20N□,SMC-160808Q-R15□,SMC-201209Q-5N6□,SMC-201209Q-2N7□,SMC-060303Q-12N□,SMC-160808Q-47N□,SMC-060303Q-39N□,SMC-100505Q-1N5S,SMC-100505Q-5N1S,SMC-100505Q-2N2S,SMC-060303Q-3N6□,SMC-100505Q-12N□,SMC-201209Q-18N□,SMC-060303Q-2N9□,SMC-100505Q-3N9S,SMC-060303Q-1N4□,SMC-160808Q-R56□,SMC-060303Q-0N7□,SMC-160808Q-R68□,SMC-060303Q-4N3□,SMC-160808Q-1N5S,SMC-060303Q-2N1□,SMC-160808Q-2N2S,SMC‐Q SERIES,SMC-060303Q-47N□,SMC-100505Q-R10□,SMC-100505Q-R22□,SMC-201209Q-82N□,SMC-201209Q-3N3□,SMC-100505Q-3N0S,SMC-100505Q-R18□,SMC-060303Q-R10□,SMC-100505Q-1N6S,SMC-060303Q-1N7□,SMC-060303Q-3N1□,SMC-060303Q-8N2□,SMC-060303Q-2N4□,SMC-100505Q-82N□,SMC-160808Q-1N0S,SMC-060303Q-22N□,SMC-160808Q-4N7S,SMC-060303Q-15N□,SMC‐Q,SMC-100505Q-R33□,SMC-160808Q-1N8S,SMC-160808Q-27N□,SMC-160808Q- SERIES,SMC-100505Q-2N0S,SMC-060303Q-6N8□,SMC-060303Q-7N5□,SMC-100505Q-1N3S,SMC-060303Q-3N9□,SMC-060303Q- SERIES,SMC-100505Q-18N□,SMC-201209Q-12N□,SMC-060303Q-0N9□,SMC-060303Q-3N8□,SMC-060303Q-2N3□,SMC-201209Q-R22□,SMC-060303Q-1N6□,SMC-201209Q- R15□,SMC-201209Q-R10□,SMC-060303Q-3N0□,SMC-100505Q-9N1□,SMC-160808Q-3N9S,SMC-160808Q-12N□,SMC-060303Q-27N□,SMC-160808Q-39N□,SMC-160808Q-R27□,SMC-160808Q-R39□,SMC-201209Q-47N□,SMC-100505Q-3N6S,SMC-100505Q-4N3S,SMC-060303Q-2N6□,SMC-100505Q-5N6S,SMC-100505Q-22N□,SMC-100505Q-68N□,SMC-060303Q-1N9□,SMC-201209Q-27N□,SMC-060303Q-9N1□,SMC-060303Q-3N3□,SMC-160808Q-R47□,SMC-060303Q-6N2□,SMC-160808Q-1N2S,SMC-060303Q-1N1□,SMC-060303Q-82N□,SMC-160808Q-5N6S,SMC-160808Q-22N□,SMC-160808Q-68N□,SMC-060303Q-56N□,SMC-100505Q-7N5□,SMC-060303Q-18N□,SMC-100505Q-1N1S,SMC-160808Q-2N7S,SMC-100505Q-6N8□,SMC-160808Q-SERIES,SMC-100505Q-R27□,SMC-100505Q-3N3S,SMC-100505Q-15N□,SMC-201209Q-15N□,SMC-100505Q-6N2S,SMC-100505Q-R15□,SMC-060303Q-1N8□,SMC-100505Q-33N□,SMC-060303Q-4N7□,SMC-100505Q-56N□,SMC-160808Q-R12□,SMC-060303Q-3N2□,SMC-201209Q-39N□,SMC-060303Q-2N5□,SMC-160808Q-8N2□,SMC-100505Q-10N□,SMC-060303Q-1N0□,SMC-160808Q-3N3S,SMC-060303Q-33N□,SMC-160808Q-6N8□,SMC-100505Q-8N2□,SMC-060303Q-10N□,SMC-201209Q-1N5□,SMC-160808Q-15N□,SMC-060303Q-68N□,SMC-201209Q-2N2□,SMC-100505Q-1N2S,SMC-100505Q-2N7S,SMC-100505Q- SERIES

数据手册  -  三礼电子  - Rev1.0  - 20220221 PDF 中文 下载

桑德斯(SMC)TVS阵列选型指南

目录- TVS Arrays   

型号- S16C03-8,S23C24,SMDB12C,SMDA15C,SMDB24C,SMDA03C,S1612-8,SMDA24C-4-2,S16LCC15-8,SMDB03LCC,S23LC24,S16C15-8,SMDA24,S23C15,SMDA12C-4-2,SMDA05LCC,S23C12,S8ULC15-2,S16LC15-8,SMDA03-7,SMDA12LCC,SMDA03-6,S16LCC03-8,SMDB05LCC,SMDA15,S23LC12,S23LC15,SMDA12,SMDA15C-4,S23C03,S8ULC05-2,S16LC05-8,S16LC24-8,S23C05,SMDA15-7,S2315,SMDA15-6,S8ULC24-2,SMDA15C-5,SMDB24LCC,S2312,S16LCC12-8,SMDB05C,S8ULCC24-2,SMDA05,S43LCC0405,SMDA24C-5,SMDA03,SMDB24,S43LCC0403,S8ULCC05-2,S23LC03,SMDA24C-4,S16C12-8,S16LC12-8,SMDA03LCC,SMDA24C,SMDA12C,S2305,S1624-8,S8ULC12-2,S16C24-8,S43LCC0412,S23LC05,S1605-8,S16LCC08-8,SMDA03C-4-2,S2303,S8ULCC12-2,SMDB15,S16C05-8,S43LCC0415,SMDB12,SD32303,SMDA12-6,SMDA12-7,SD32305,S2336,SMDB15C,SMDB05,SMDB03,S43LCC0424,SMDA15C-4-2,SMDB03C,SD32312,SMDA05-6,SD32315,SMDA05-7,SMDA05C-4,SMDA12C-5,SMDA24-6,SMDA05C-5,SMDA12C-4,SMDA24-7,LCDA03,LCDA05,S16LCC05-8,S16LCC24-8,S2324,SD72305,SMDA05C,S8ULCC15-2,SMDA05C-4-2,S16LC03-8,SMDB15LCC,SD32324,LCDA12,S1615-8,S8ULC03-2,LCDA15,SD88205,SMDA15LCC,S8ULCC03-2,SMDA24LCC,SD92305,SMDA03C-5,S23C36,SMDA03C-4,SMDB12LCC,S1603-8,LCDA24

选型指南  -  SMC  - 2016/3/2 PDF 英文 下载

桑德斯(SMC)常规整流二极管选型指南

目录- Standard Rectifiers   

型号- S3A,1A1,1A2,RL253G,1A3,6A8G,S3B,1A4,1A5,1N5400G,S3D,1A6,S3G,1A7,6A05,S3K,S3J,S3M,1N5408G,S1A-F,1N4007G,S1DB,RL201G,RL104G,6A05G,RL252G,S5BC,1N5407G,S1J-F,1N4005FL,6A10,S1KB,1N4001FL,1N4001,1N4002,1N4003,S5KC,1N4004,S3GB,SD560B,1N4005,RL103G,SD560BP,1N4006,1N4007,1N5402G,S3AB,6A10G,BY133,1N4001G,S1D-F,6A1G,RL106G,RL255G,S3JB,RL203G,S1M-F,RL254G,1N5401G,S5DC,SHV30300G,RL253,RL254,1N4002G,RL251,RL252,1N4004FL,S1MB,RL105G,6A2G,RL257,RL202G,RL255,S5MC,RL256,SDD860,6A4G,1N5404G,1N4003G,RL206,S3DB,RL205G,RL207,RL204,RL205,1N5401,RL202,1N5400,RL203,RL257G,1N5402,RL201,1N5404,1N5407,1N5406,1N5408,1N5403G,S3BB,1N4007FL,S3KB,1N4003FL,1N4004G,G1A,RL204G,S5GC,G1B,RL107G,G1D,G1G,RL256G,S1GB,G1K,RL251G,G1J,G1M,S1A,S5AC,6A6G,S1B,6A1,6A2,S1D,S1G,6A4,1N5406G,6A6,S1K,6A8,S1J,S1M,S1JB,S1B-F,1N4005G,RL107,S1BB,RL105,RL106,RL207G,RL103,RL102G,RL104,S5JC,RL101,RL102,S2B,S2A,S2D,1N5405G,S2G,S1G-F,S2J,S2K,S1K-F,S2M,DSR1B,1N4006FL,DSR1D,S3MB,1N4006G,DSR1A,1N4002FL,DSR1K,DSR1J,S1AB,DSR1M,RL206G,DSR1G,RL101G,SDD660,SD360B

选型指南  -  SMC  - 2016/3/2 PDF 英文 下载

1.27 SMC Crimping Female

型号- 7100-FXXX124XXIFX0X

数据手册  -  锦凌电子  - REV A  - 202.04.22 PDF 英文 下载

桑德斯(SMC)TVS瞬态电压抑制器选型指南

目录- Transient Voltage Suppressor   

型号- SMCJ36CA,SA13CA,SMAJ6.0CA,30KPA45A,SMAJ40CA,SMDJ12A,SMDJ43CA,SMBJ51A,5KP200A,30KPA170CA,SMDJ13A,P6KE22A,20KPA26CA,5.0SMCJ14CA,TPK07KP18A,5.0SMLJ51A,P6KE24A,SMDJ78CA,3.0SMCJ45A,SMDJ11A,30KPA280A,SD05,SMAJ54A-L,SA43A,SMAJ150CA-L,SMCJ14CA,P4KE13CA,5.0SMLJ150A,5KP75A,TPK07KP17A,SMCJ78A,TPK15KP130A,30KPA300CA,P6KE18CA,SMDJ10A,SMAJ400CA-L,5KP78A,SMCJ100CA,30KPA48A,5.0SMCJ36CA,20KPA48CA,P6KE20A,5KP28CA,SMBJ300A,5KP30A,SMBJ150CA,1.5KE150A,SMDJ170A,30KPA45CA,SMAJ70A,SA7.0CA,SMAJ75CA,SMBJ16CA,SMDJ58A,TPK15KP9.0A,SMAJ36CA-L,SA45A,SA48CA,1.5KE220CA,SMCJ30A,3.0SMCJ48CA,3KP36CA,SMAJ45CA-L,P6KE27A,3.0SMCJ48A,5.0SMLJ54A,SA40A,5.0SMCJ58CA,TPK30KP90A,TPK07KP14A,SMCJ75A,3.0SMCJ13CA,SA22CA,P6KE8.2CA,SMAJ100A,SMAJ30A-L,3KP100CA,30KPA42A,SMDJ30CA,P4KE130CA,P4KE180A,SA110CA,TPK07KP13A,30KPA54CA,P4KE250CA,15KPA75CA,30KPA150A,SMDJ54A,30KPA43A,30KPA198A,SMDJ160CA,1.5KE7.5A,3KP14CA,20KPA180A,SMBJ400CA,3.0SMCJ26CA,P4KE22CA,TPK07KP16A,15KPA40CA,15KPA70A,5KP15CA,1.5KE51A,P6KE100A,TPK07KP15A,SMAJ70CA-L,TPK15KP70CA,SA70CA,1.5KE36CA,15KPA75A,P6KE36CA,TPK15KP30A,15KPA100A,TPK30KP54A,5KP36A,TPK15KP17CA,TPK15KP78A,5.0SMCJ18A,20KPA280CA,TPK07KP10A,5KP200CA,5.0SMLJ58A,5.0SMCJ18CA,SMAJ18CA,SA17CA,1.5KE170CA,SMAJ8.5CA-L,SMAJ22A-L,20KPA56A,5KP90CA,3KP24A,3.0SMCJ85A,TPK15KP9.0CA,SMDJ51A,3KP45CA,5KP190CA,SMAJ160A-L,SMCJ18CA,5.0SMLJ110A,3KP58CA,1.5KE56A,5.0SMLJ12A,20KPA160CA,SMDJ120CA,SA5.0CA,TPK07KP12A,5KP24CA,SMAJ250A-L,3KP22A,5.0SMLJ13A,SMBJ90A,SMBJ12CA,P4KE530A,SMAJ10A-L,SMAJ130CA,SMBJ350CA,TPK07KP11A,SMCJ70A,SAC8.5,SA48A,SMBJ5.0A,P4KE39CA,3.0SMCJ40A,SMCJ100A,5.0SMCJ14A,SMAJ43CA-L,1.5KE10A,5.0SMLJ14A,20KPA52A,3.0SMCJ100CA,P6KE180CA,3.0SMCJ6.5CA,TPK15KP110CA,3.0SMCJ17CA,3KP28A,5.0SMCJ15A,5KP7.5CA,TPK15KP26CA,3.0SMCJ70CA,TPK30KP51A,TPK15KP33A,5.0SMLJ15A,SMDJ5.0A,SA26CA,30KPA58CA,3KP10CA,1.5KE12A,15KPA18CA,P4KE400A,TPK30KP100A,SMAJ300A-L,5.0SMCJ16A,SMBJ170A,1.5KE10CA,5.0SMLJ16A,TPK15KP36A,SMAJ78A-L,1.5KE11A,30KPA144CA,3KP26A,15KPA30A,SMDJ12CA,15KPA78A,P6KE27CA,3.0SMCJ43A,TPK15KP7.0CA,30KPA84A,5KP33A,15KPA180CA,5.0SMCJ17A,5.0SMLJ17A,5KP11CA,30KPA36CA,SMBJ5.0CA,P4KE6.8CA,20KPA52CA,3.0SMCJ6.5A,SA150CA,TPK15KP70A,TPK15KP13CA,5.0SMCJ58A,1.5KE540A,TPK30KP150,SMCJ85CA,5.0SMLJ18A,15KPA26CA,15KPA24A,30KPA90A,3KP64A,P4KE20A,SMBJ78CA,P4KE68A,20KPA60A,SMAJ48CA,SMBJ43CA,TPK30KP160,5.0SMCJ11A,5KP33CA,TPK07KP30,TPK07KP33,SMCJ7.5A,TPK07KP36,30KPA71CA,SA90A,SMCJ110A,15KPA110CA,SMAJ9.0CA-L,30KPA102A,5KP20CA,TPK15KP150CA,SMBJ18A,20KPA132A,SMAJ26A-L,TPK07KP28,TPK30KP170,SA75CA,P4KE62CA,5.0SMCJ12A,SMCJ8.5CA,TPK07KP43,TPK07KP45,P6KE220CA,3KP6.5A,SA40CA,TPK07KP48,1.5KE27CA,15KPA22A,TPK07KP40,5.0SMCJ13A,SMAJ26CA,5.0SMCJ40CA,TPK15KP48CA,5KP160A,TPK30KP180,TPK30KP100,20KPA96CA,SMAJ100A-L,3.0SMCJ40CA,3KP9.0CA,1.5KE510CA,TPK30KP58A,P6KE22CA,P6KE100CA,SMBJ16A,20KPA240CA,SMBJ30CA,5KP28A,TPK15KP180A,SMAJ36A,30KPA108A,5.0SMCJ54A,TPK30KP110,3KP20A,15KPA28A,SMAJ8.5CA,5.0SMLJ14CA,SMBJ440CA,P4KE100A,1.5KE130CA,SMAJ58A-L,SMBJ17A,SMBJ120CA,TPK15KP22CA,TPK30KP120,20KPA120CA,5KP8.0A,3KP75CA,5KP64CA,SMBJ14A,SMAJ13CA,TPK15KP7.5CA,SMDJ16CA,TPK30KP130,SMBJ130A,15KPA26A,15KPA48CA,P4KE530CA,P4KE62A,3KP40CA,SMAJ14A-L,SMAJ220CA-L,3.0SMCJ75CA,5KP120CA,SA100A,P6KE180A,SMBJ15A,SMAJ170CA,SMAJ18CA-L,TPK15KP75A,SMBJ9.0A,20KPA56CA,15KPA180A,30KPA260CA,SMBJ12A,30KPA144A,SMAJ6.0A,P6KE62CA,SMBJ350A,3KP100A,SM5S22,SA7.5CA,SMDJ120A,SMAJ51A-L,SMCJ7.0A,SMDJ51CA,15KPA22CA,SMAJ7.0A-L,SMBJ13A,SMAJ6.0CA-L,1.5KE62CA,5.0SMCJ22CA,5.0SMCJ51A,SMAJ75A-L,SMCJ170CA,P6KE75A,SMAJ33A,SMCJ54CA,P4KE480CA,30KPA75CA,SMCJ150A,20KPA172A,P6KE6.8A,SMBJ58A,SA6.0A,5KP70A,5KP8.5A,SMAJ78A,SMAJ30A,SMAJ120A-L,5KP120A,5.0SMLJ36CA,SMBJ10A,SMDJ18A,P4KE27A,SMBJ11A,5KP51CA,SMAJ22CA,SMBJ220A,SMCJ6.5CA,SMAJ75A,SMCJ36A,TPK07KP10,SMAJ100CA,TPK07KP11,TPK07KP12,TPK07KP13,TPK07KP14,TPK07KP15,SMAJ350CA-L,SMDJ60CA,SMDJ17A,SMBJ7.5CA,1.5KE100A,P6KE30A,SMCJ45CA,TPK07KP20,3KP60A,TPK07KP22,TPK07KP24,30KPA84CA,TPK07KP26,P6KE75CA,P4KE24A,SMDJ16A,TPK07KP16,TPK07KP17,TPK07KP18,SMAJ6.5A,SMBJ440A,20KPA30CA,SMCJ10CA,TPK30KP180A,SMCJ58CA,3.0SMCJ22CA,SMDJ7.5CA,3KP18CA,SMAJ6.5CA,5.0SMLJ60A,SMBJ200CA,5KP210A,1.5KE18CA,5.0SMLJ45CA,5KP60CA,P4KE160CA,SMDJ15A,SMCJ33A,1.5KE8.2CA,3.0SMCJ6.0A,P4KE22A,SMBJ54A,SMDJ14A,SMDJ8.5A,30KPA216CA,P4KE75CA,P4KE6.8A,SA6.5A,1.5KE91A,SA36CA,TPK15KP120A,SMAJ6.5A-L,SMAJ8.0A-L,P6KE170CA,SMDJ20CA,15KPA30CA,TPK15KP100CA,15KPA170CA,1.5KE160A,SMAJ440CA-L,30KPA58A,TPK15KP51CA,SMAJ7.5A,3KP6.0CA,5KP64A,SMDJ160A,3KP26CA,SMAJ60A,SMAJ43A-L,P6KE36A,SMAJ13CA-L,3.0SMCJ33A,SMBJ40A,TPK15KP8.5A,1.5KE550CA,1.5KE20CA,SMDJ48A,SMCJ7.0CA,SMAJ75CA-L,P4KE36CA,SMCJ20A,5.0SMLJ64A,SA14CA,P6KE200A,3.0SMCJ110CA,20KPA36CA,SMBJ85A,SMBJ28CA,P4KE120CA,5.0SMLJ20CA,SMCJ48CA,SMAJ18A-L,SMDJ33CA,SMDJ45A,SMAJ110CA-L,30KPA180CA,TPK30KP85A,15KPA260A,P6KE33A,SA33A,SMCJ13CA,5.0SMLJ160A,P6KE39A,3.0SMCJ36A,SMDJ64CA,3KP13CA,5KP180CA,SMDJ8.0A,1.5KE62A,20KPA26A,5KP60A,TPK07KP26A,20KPA104CA,3.0SMCJ36CA,SA45CA,SMCJ26CA,SA75A,20KPA24A,SMDJ43A,SMAJ20CA-L,30KPA54A,SMDJ150CA,SMBJ15CA,20KPA300CA,5.0SMCJ24CA,5KP16CA,TPK15KP60CA,1.5KE250A,SMCJ64A,SA58CA,5.0SMLJ20A,SA78A,SMAJ85CA,1.5KE8.2A,20KPA192

选型指南  -  SMC  - 2016/3/2 PDF 英文 下载

桑德斯(SMC)沟槽式肖特基二极管选型指南

目录- Ultra Low VF Schottky Rectifiers   

型号- STF3060CR,STB30100,STD15120C,STD8150,STF15150C,ST8200,STF10100C,STD10150C,STF3080C,STB5150,STF8200,ST1545AX,STB40150C,STB10120C,STD2045,STF40150CR,STB3045C,STF20200,ST15100C,STF4060C,STB1060C,ST1050S,ST20200,STB30120C,STF2045C,ST20200C,STB20200C,ST5200BAX,STD5200,STB12100,STF30200C,STB15200C,STD20100C,STF20120CR,STB1560C,ST30120C,ST560S,ST5150,STB8200,ST3045C,ST860,ST1060C,STB4060C,STD1060,ST40150C,ST30100,STF5150,STB20200,STW30200C,STB10150,STF40200CR,ST1060S,STF30100C,STD1560C,STF20120C,STF6080C,STF3045C,STF30100,STB40200C,STD12100,STF30100S,STB560,STD860,STF30150CR,ST1550S,STD1060C,STD12100C,ST3060LC,STB15150,STB3080C,STF12100,ST8120,ST2060DJF,STB2045C,ST5100S,ST10150,ST2050S,STD15200,STF1560C,STF1560,STB15150C,STB20100,ST10150C,ST1045,STF4080C,STF30120CR,STD5100C,STF15200C,ST3050DJF,STB30100C,STD10200C,ST1060,ST1560C,ST12100,STB5100,STD2045C,STF1060C,STD560,STD8120,STF860,STF5120,STD1045,STB12100C,STF15120CR,ST15200C,STB10120,STF1560CR,STD20100,ST30100C,ST8100,STD15150C,STF15150,ST4045C,STB40100C,ST20100C,ST2045AX,STF40120C,STB20150C,STF5100,ST15150C,STB10150C,STB15120,STB20120,STF10200C,ST2060C,STB30200C,STF30120C,ST15150,STF10120CR,STF10150,STF20100C,STF10200LC,STB10100,STB2080C,STD8100,STB1560,STB5120,ST5150SAX,STF1060CR,ST2050DJF,STF2050C,STF4045C,ST10200C,STB1045C,STB3060C,ST2060,STF10120,STD20150,STB60100C-A,STB20120C,STD15120,STF10150CR,ST15120,STF5200,STD10100,STF20100S,STF2060,STB15100,ST40120C,ST560,ST20150,ST30200C,STD1045C,ST3060DJF,STB60100C,STF12100C,STB1545C,ST10100S,ST5100,STB10200,STD8200,STF8150,ST10120,STF2045,STB20150,STF1080C,STB1060,STB860,STF2060C,ST5100SAX,STF2060CR,STF20200C,STF10100,STF10150C,STD10100C,ST20120C,ST5100BAX,ST1545S,ST15100,STD15100,STB2060,STW40100C,STF40100C,ST30100DJF,ST2080S,STD10200,STB15120C,STB40120C,STB15200,ST10100C,ST880S,STF20150CR,ST1045AX,ST2080C,STD15200C,ST5200,STB30150C,ST1045C,ST8150,STB5200,STD5150,ST3060C,ST2050AX,STB8150,STF15120,STB2060C,STF40120CR,STF1060,ST10100,STB2045,STB10200C,ST1045S,STF15200CR,ST2045,STD1545C,STF15100C,STF20150,STD15100C,STB8100,STF3060C,STF40150C,STF10120C,STF10200,STF1045,ST15200,STB20100C,ST40100C,ST20150C,STF8120,STD5120,STF30150C,STF15150CR,STF1545C,STB10100C,ST15120C,STF60100C,STF10200CR,STF20120,ST20120,ST60100C,STF15100,STD15150,STB4045C,STF20150C,STD1560,ST1050AX,STD10150,ST12100C,ST10200,STF1045C,ST1545C,ST580S,STF2080C,STB8120,STD10120C,ST12100S,STD5100,STF30200CR,STB4080C,STF8100,ST10120C,ST8100S,ST1040S,STD10120,STB1045,STF4050C,ST1300A,STF20100,STB15100C,ST860S,ST20100,ST5120,STF15200,ST4060C,ST1560,STF560,ST40200C,STF4060CR,ST3080C,STF40200C,ST2045C,STF20200CR,ST1550AX,ST30150C,STF15120C

选型指南  -  SMC  - 2016/3/2 PDF 英文 下载

测试报告  -  硕凯电子  - 8-Jun-2021 PDF 英文 下载

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