【经验】基于单晶硅传感器的MEMS惯性传感器是如何工作的？

时间： 2020-01-06 来源：First Sensor(TE收购)

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MEMS惯性传感器,单晶硅传感器,FIRST SENSOR,TE Connectivity

在技术应用中测量倾斜度，加速度和振动需要高精度的惯性传感器：MEMS（微型机电系统）系列传感器采用单晶硅传感器元件，融合最先进的微机械加工技术。不同的微机械加工技术用于生产，每种技术都有不同的优势。FIRST SENSOR为MEMS生产开发了新的微机械加工技术，并推出了惯性传感器，该惯性传感器在创新产品系列中结合了其他传感器的优势。凭借卓越的性能特征、惊人的性价比，在地球工程，状态监测，导航和机器人技术领域得到了广泛的应用。

MEMS –微型机电系统：高精度加速度计可以做什么？

微型微机电系统(MEMS)传感器现在可以测量所有三维空间的加速度。MEMS惯性传感器已经被证明是非常稳定、可靠的和快速的。这些最先进的产品还具有极高的温度稳定性。它们甚至能够检测极其微小的倾角或加速度变化。下图片显示了其极高的分辨率：即使一根直径为100 µm的头发使10米长的木板弯曲的角度也能被检测到。这对应于仅0.0005°（2弧秒或10 µm / M）的偏转。

图1 检测示意图

数字化的未来

MEMS传感器技术是物联网的一项关键技术。随着数字化的发展，微型的加速度计和倾角仪也将继续发展。例如，将来，惯性传感器将被进行智能编程，并将具有微控制器，微型电池或微型无线电芯片以在线发送其测量数据。

微型格式，微型生产成本，微型运营成本：电容式惯性传感器的技术概念

MEMS惯性传感器用于电容性测量倾角、加速度和振动，依赖于最先进的微机械制造工艺和一个微型硅传感器:一个弹簧质量系统即只有几微米宽的硅网结构。在加速过程中，悬在弹簧上的质量会发生偏转，从而使测量容量发生变化。ASIC读取容量变化并传输其测量值。在传感器的生产过程中，质量和弹簧(记住，这些结构通常只有千分之一毫米厚)被蚀刻在硅上，其可以大量生产MEMS，同时也消耗更少的能量。

图2 产品实物图

MEMS惯性传感器的技术组件：
· 单晶硅传感器

· 高性能ASIC

· 两个芯片外壳

图3 产品参数表

传感器的核心:单晶硅传感器

硅传感器（每个MEMS的核心）传统上是批量生产或以表面微加工工艺制造。但是，制造商First Sensor现在正在使用新的制造技术：HARMS（高宽比微结构）和AIM（气隙绝缘微结构）工艺。前者使微观结构具有高的高宽比，进而具有极低的交叉轴灵敏度。后者通过使用气隙隔离元件来最小化寄生电容。因此，MEMS可提供比所有传统制造的惯性传感器组合更多的优势。

First Sensor 传感器在测量倾斜度，加速度和振动方面的优势：

· 灵活的MEMS设计：测量范围从1到15 g

· 四个标准传感器：四个不同的测量范围

· 一个传感器测量两个轴：易于使用

· 高宽比微结构：具有极低的交叉轴灵敏度，低损伤，长期稳定的传感器

· 气隙绝缘微结构：寄生电容极小

First Sensor的高精度惯性传感器的当前应用领域：

· 建筑物的状态监测

· 监控石油天然气陆地/海上基础设施，核能，天然气和水力发电厂等

· 监视风能和太阳能发电厂，高压线路，水坝，管道等

· 稳定和校准准系统

· 导航

· 基础设施和运输

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本文由wshine翻译自First Sensor(TE收购)，版权归世强硬创平台所有，非经授权，任何媒体、网站或个人不得转载，授权转载时须注明“来源：世强硬创平台”。

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TE Connectivity（泰科）连接器选型指南

目录- Connector Performance Specification IP rating and wire gauge information Connector Series Overview Electrical Connectors Secondary Wedgelocks Connector Accessories Contacts Crimp Tooling DEUTSCH Modification List Connector related Glossary

型号- DTM06-6S-E007,HD34-18-6PN-C030,HDP26-24-9PN,HD14-6-96P,HDB36-24-23SN,DTM06-6S-E004,DTM06-6S-E005,2151239-2,2151239-1,DT SERIES,962970-1,HD34-24-16PN-059,962970-7,3-1703843-1,DRC18-40SAE-P013,3-1418479-1,1-1719504-1,1-1719504-2,HDP26-24-9SN-L015,DT04-12PD-LE21,776523-4,DTP06-2S-E004,776523-3,HD10,776523-2,776523-1,HDP26-24-9SN-L017,DTP06-2S-E003,DTM4P-BT,DT13-48PABCD-R015,HD34-18-21SN-072,2138839-2,2138839-1,DT15-08PB,DT15-08PA,4-1703839-1,DT15-08PD,DT15-08PC,1-962919-1,1-1564414-1,1-962919-2,HD34-24-16PN-072,1-1418883-1,HD34-18-8SN-072,HDB36-24-23PT,HD34-24-19PE-059,HDB36-24-23PN,DTP SERIES,JS-16-00,HD30,DT04-4P-RT01,HDP26-24-9PE,HD36-18-21PN,DT04-4P-RT03,DRB12-60PAE-L018,DT06-12SC-CE05,2-1564330-1,DT06-12SC-CE06,DTM06-12SD-E007,DT06-12SC-CE01,DT06-12SC-CE04,HDP24-18-20PN-L024,HDP26-24-23ST-L017,776536-4,W4SC-P012,776536-3,HDB36-24-23PE,HDP26-24-23ST-L015,776536-2,776536-1,HD34-18-8SN-059,1011-257-0205,3-1564522-1,4-1564518-1,1394133-1,HD36-24-9PN,2266111-1,HD10-9-96PE-B025,HD34-24-14PE-059,HD36-24-31PE,1-1564516-1,1-1564297-6,HD36-24-31PT,DTF13-6P-G003,HD36-24-9SN,HDC14-9-JDL,776273-4,776273-2,776273-1,DTT-12-01,HD36-24-31SE,DTT-12-00,2266124-1,0460-002-1631,HDP26-24-9SE,HDP26-24-9SN,HD36-24-31ST,HD34-24-14PE-072,4-1534127-1,DT04-12PA-B016,HDP24-18-20PN-L017,1-776262-5,2151840-1,1426425-2,2151840-2,1426425-1,1-776262-2,DTF15-12PB-G003,1-776262-1,HDP26-24-35PN,1-776262-4,776273-5,1426425-6,2-1718324-1,1060-12-0144,DT04-08PA-E004,HD34-24-23PE-059,DT04-08PA-E005,DT04-08PA-E003,HDC14-6-LA,DT04-08PA-E008,DTF13-12PA,HDP26-24-7SN-C038,DTF13-12PD,DTF13-12PB,DTF13-12PC,3-1418448-1,3-1418448-2,DT12S-BT-EN,DT15-12PD-B016,3-1718324-1,1473712-1,DTM06-08SA-E007,2-1823402-1,776429-1,HDP24-24-14PN-L017,776429-3,776429-2,HDP24-24-14PN-L015,776429-4,DRC6-705BB-P013,1028-034-1205,1060-12-0166,106*-12-01**,1011-047-0605,1-776275-2,1-776275-1,DT04-08PA-P026,DT04-12PB-BL04,DT04-08PA-P021,3-1823402-1,HD34-24-23PE-072,1241598-1,HD10 SERIES,776286-2,DT06-4S-C017,776286-1,DT06-4S-C015,965982,DTM06-2S-EP10,0411-353-0805,DT04-12PB-BL11,1871412-2,DT15-12PB-6003,1871412-1,DT13-08PB-G003,WM-12S-B026,0460-264-16141,3-1703808-1,776495-3,776495-4,HD34-18-21SN-059,4-1564416-1,DRC12-24PB,DRC12-24PA,DRC12-24PD,DRC12-24PC,0514-009-4001,DTM04-12PD-EE04,HD34-24-19PE-072,DT04-08PA-CL03,DT04-08PA-P028,1011-118-0405,DTM06-12SB,DTM06-12SC,776495-1,DT04-08PA-CL07,776495-2,DTM06-12SA,DTM06-12SD,DRC14-70PAE,DTCE06-1-4S-E003,4-1703808-1,776299-1,776299-2,1-968876-3,1-968876-1,HD34-18-14PE,1-776231-2,1-776231-1,HD34-18-14PN,1-776231-6,1-776231-5,DRB16-102SAE-L018,1-776231-4,1028-013-0805,HD34-18-14PT,STRIKE,1011-241-0605,HD36-18-21SN,2-963749-1,HD36-24-16SE-059,W3P-1939,2-963749-3,2-963749-2,DTM04-12PD-L012,DT04-12PA,DRC26-24BT,DT04-12PB,EEC-325X4B-E016,DT04-12PC,DT04-12PD,1418885-1,1703278-2,W2S-SDT-24V,2-1418483-1,2098251-2,1703278-5,2098251-1,1418885-3,DTV SERIES,DT4P-BT-BK,HDP26-24-33PN-L017,HDP26-24-33PN-L015,929963-1,WHDS-24-1,DT04-12PA-P016,HDP26-18-20SN-L024,HDP24-24-23PT-L017,WHDS-24-2,HDB36-24-18PN,HDP24-24-23PT-L015,HDB36-24-18PE,DT04-08PB-CE01,4-1703843-1,HD36-24-16SE-072,2-963748-2,2-963748-1,2-963748-3,1-1418362-3,1-1418362-1,962978-1,DT06-4S-EP06,962978-7,HD34-18-14SE,HD34-18-14SN,962978-8,HDB36-18-21SN-059,929963-8,DT04-12PA-P031,HDB36-24-35PN-059,DT06-4S-EP11,3-1418483-1,DTHD04-1-4P-L009,HD36-24-23PN-072,DT04-12PA-CL03,DTHD04-1-4P-L013,HD10-6-GKT,DT04-3P-EP10,0730-001-0905,DRB12-128PANE-L018,DT04-12PA-P026,0462-209-16141,DT04-12PA-P021,HDP26-18-20SN-L017,HDP24-24-33SN-L015,HD36-24-23PN-059,DT04-12PA-P030,HDP24-24-33SN-L017,1-962968-0,1062-20-0622,770854-3,W2SB-P012,770854-1,1241417-1,1-776200-5,1241417-3,DT04-08PA-LE11,DT04-6P-CE01,DT04-6P-CE03,DT04-6P-CE02,1418437-1,1028-017-0005,2266119-1,HDP26-24-9PE-L015,HDP26-24-9PE-L017,HD17-9-1939SE,DT04-08PA-LE03,W4S-P012,1-776200-4,1-776200-1,1-776200-2,DTP04-4P-L012,DT04-4P-L012,1027-006-0800,DTCE04-1-4P-LE03,HDP26-24-18PN-L015,HDB36-24-23PT-059,DT04-12PA-P075,HDP26-24-18PN-L017,HDP24-24-47SE-L017,HDP24-24-47SE-L015,DTMN06-2S,DTP04-2P-C015,1011-086-0605,2-1703843-1,DTM3P-BT-BK,DT04-6P-CE09,1011-245-0805,1-963748-1,1-963748-2,HD34H-24-23PP,1-963748-3,DRC16-70SC-P013,2112302-1,4-1564522-1,DT12S-BT-BK,2-1670214-1,DRC18-40SDE,SRK06-FLD-64A-001,HD36-18-6SN-C030,962919,962915,962916,962917,962918,1011-046-0405,965785-1,1241381-3,HDP24-24-14SN,DRC18-40SCE,1241381-1,1241381-2,HDP26-24-47SE,DT04-2P-E003,DT04-2P-E004,DT04-2P-E005,DT04-2P-E008,DT04-3P-C017,DT04-3P-C015,2292860-1,2292860-2,2292860-3,HDP26-24-47PE-L017,DRC23-24PA,DRC23-24PB,HDP26-24-21PE,DRC24-GKT,DRC18-40SBE,HDP26-24-47PE-L015,2292797-3,2292797-2,HD34-24-19PE,2292797-1,HDP26-24-21PN,770680-2,770680-1,1-1534126-1,770680-5,DT04-08PD-C015,770680-4,DT04-3P-C008,114020-90,HDP24-24-19SE-L024,W3S-1939-P012,3-1670214-1,DRC18-40SAE,1-1564520-1,HDP24-24-19SE-L017,HDP24-18-8PE-L017,HD34-24-19PN,DT13-12PA-B016,2151782-1,2151782-2,1534791-1,HDP24-24-19SE-L015,DRC26-38S01-P017,DT15-12PA-B028,2-1564522-1,3-1534126-1,4301-12S,776434-1,1027-017-1200,776434

选型指南 - TE CONNECTIVITY - 06/16 PDF 英文下载

TE Connectivity新型铝漆包线端接解决方案特点和应用优势介绍｜视频

TE connectivity产品经理Bowen王介绍了漆包线端子的产品特征和应用优势。

原厂动态发布时间 : 2023-11-17

【选型】TE Connectivity（泰科）CIRP系列MIL-C-5015型金属卡扣式圆形连接器选型指南（中文）

目录- CIRP金属卡扣式圆形连接器产品介绍连接器技术信息/部件编号说明/基本组件示意图外壳组件绝缘子独立导线密封垫圈压接端子端子型谱/绝缘体规格表绝缘子方向介绍附加对齐/极化装置后侧/前侧面板安装插座插头连接器锁紧支承螺母直/90°弯头导管热缩屏蔽层转接器外壳热缩扩展盒递升式/递降式/电缆密封套转接器带屏蔽层的外壳扩展盒 CRA转接器电缆夹/套筒式衬套面板垫圈、非导电/导电式前侧和后侧安装连接器连接器固定螺母板/垫圈填充插头插座安装详情图表金属保护帽 RFI编织护套/BANDIT带/KNITMESH编织层用于压接端子的工具/压接端子补充工具

型号- CIRWA27F,CIRP24IC,CIRSB**FPGS,CIRP36-A22S,CIRB608109,SDA,CIRP18-19GSS,CIRB600061,CIRP24-10GPS,CIRB-36-#GA-#M32,TEB 20 MGA DM32,CIRP18-19GSL,SUA,CIRP20-15S,CIRB**NP,CIR6M3800731,CIR6M3800730,CIRP24-10GPL,CIRB ** CRA M32,CIRP系列,CIRBMKM1050,CIRPSE24FS,CIRP22XF,CIRP03,CIRP22XR,CIRP18-19PFS,CIRP40-A60S,CIR8012ETA,CIRMSP3057A,CIRBMBS050015,CIRMSP3057C,CIRB-18-#GA-#M32,CIRB-24-#GA-#M32,CIRPPSE06T****,CIRP03T,CIRP18XF,CIRP22IC,CIRB600090,CIRBD51,CIRMSP3057C**M32,CIRP36-A22GSL,CIRSBMSH554,CIRP18XR,CIRBP**/**KPKP80,CIRP36-A22GSS,CIRP28-21GSL,CIRBP ** LBN,SHE,CIRSB**RPGS,CIRP40-A60GSS,CIRBP ** ** SHE #,CIRP18IC,CIRP40-A60GSL,CIR,CIRP28-21GSS,CIRP32XF,68-012-01,CIRPSE32FS,CIRBE**XPCAK M32,CIRBP ** ECHSA,CIRP09T,FPG,CIRBE**XPCA M32,CIR8012GET,SPTAS,CIRP32XR,CIRP28-21PFS,CIRB**EPCA M32,CIRP36-A22PFS,CIRP18-19GPS,CIRP20XF,CIRSB ** FPGS,ECHSA,CIRPSE22FS,CIRB-40-#GA-#M32,CIRP28XF,CIRP20XR,CIRP32IC,CIR8018GAT,CIRP20-15GPS,CIRP**/**KPKP3,CIRP28XR,CIRSB**FPG,CIR8016ETA,CIRBP ** ** SUA #,CIRSB ** FPG,CIRP20-15GPL,CIRP22-14GPL,CIRP18-19GPL,CIRP40-A60PFS,SCHSA,CIRP22-14GPS,CIRP20IC,CIRPSE18FS,D55E,CIRP28IC,CIRP40-A60GPS,CIRBP ** SCHSA,CIRP40-A35S,CIRP40-A60GPL,CIR80 ## CAG,CIRP22-14GSL,CIRP20-15PFS,FPGS,CIRP22-14GSS,CIRBFT8,CIRBP** ** SDA#,CIR8016GET,CIRB601200,CIRB ## #GA # M32,CIRP36-A22GPS,FT8,CIRP36-A22GPL,CIRMRP0925,CIRB-20-#GA-#M32,CIRBMBS035015,CIRP40-A35PFS,CIRP**/**KPK,68-016-01,CIRP,CIRP24-10S,CIRP18-19S,CIRP20-15GSS,CIRP32-A13S,CIRSBMSH554**,CIRP20-15GSL,CIRSB ** RPGS,CIRP22-14S,CIRPSE20FS,CIRP22-14PFS,CIRPSE06T****,CIRP32-A13PFS,CIRP28-21GPL,CIRP28-21S,CIRPSE28FS,CIRP28-21GPS,CIR8028GAT,CIR8012ITL,67-012-01,CIRB**EPCAK M32,CIRB8KFPF80 -,CIRP ** FAP,CIRB16KFP -,WA27F,CIRBMBS020010,CIR6M3800645,CIR6M3800644,CIRP40-A35GPS,CIRP24-10PFS,CIRP40XF,RPGS,CIRP32-A13GSL,CIRP03LBN2214GPSPFS*******,CIRP40XR,LBN,CIRP**/**KLKP3,CIRP32-A13GSS,CIRP40-A35GPL,CIR6M3800646,CIRB-32-#GA-#M32,CIRBMBS025015,AT 1110,CIRP24-10GSS,CIRP**/**KLK,CIRPSE36FS,CRA,CIRBD55E,CIRP36XF,CIRP40IC,CIRP36XR,RPG,CIRB**NPA,CIRP24-10GSL,CIRP00T,CIRBP** ** SPTAS #,CIRMSP3057A**M32,CIRP24XF,HT250-3,CIRB12KFPF80 -,TH592,CIRP40-A35GSS,CIRP24XR,D51,CIRP36IC,CIRP32-A13GPS,CIRBP**/**KSKP80,CIRSB ** RPG,CIRPSE40FS,CIRB600057,CIRSB**RPG,CIRB600058,CIR808ETA,CIRB600052,CIR8016ITL,CIRP32-A13GPL,67-016-01,CIRBTH592,CIRP40-A35GSL

选型指南 - TE CONNECTIVITY - 06/2016 PDF 中文下载

TE Connectivity（泰科）圆形塑料连接器选型指南（中文）

目录- 圆形塑料连接器应用与简介圆形塑料连接器产品介绍系列1 CPC连接器系列2 CPC连接器系列3 CPC连接器系列4 CPC连接器 CPC连接器附件密封型CPC连接器 CPC连接器密封附件 MIL-C-5015型圆形塑料连接器微型CPC连接器金属壳圆形塑料连接器及附件应用工具产品型号索引

型号- 206705-2,206705-1,1445820-1,1-796502-1,206705-4,206705-3,207299-3,213862-1,207299-2,207299-1,206039-1,66180-1,1445820-3,1977892-1,206137-5,206137-2,1-601-0,796439-2,206137-1,202236-5,202236-7,66358-9,225088-3,66565-4,66105-4,91521-1,66105-3,66565-7,206509-1,206838-1,206838-2,206838-3,206838-4,1-796404-1,207299-4,66598-2,2151411-[ ],3-66104-0,206934-5,796381-1,796381-2,1445537-3,1445537-1,1-745254-4,1-745254-6,1-745254-1,1-505-0,1-745254-3,2151405-□,213851-1,770902-3,770902-4,770902-6,788085-1,211103-1,1-206934-7,1-206934-8,770902-1,788085-3,1-206934-1,796272-1,213860-1,213905-1,1658540-5,1658540-4,206037-2,206037-1,1-770835-0,1-66602-0,66182-1,455-1,455-3,1658540-1,1658540-2,91523-1,66103-4,66103-3,796287-1,211770-2,745254-6,745254-7,1977883-1,208721-1,1-796406-1,1-66361-4,1-66361-6,1-66361-2,205840-4,796274-2,205840-3,207486-2,207486-1,745254-2,745254-3,213982-1,208491-1,206486-1,206486-2,1-507-0,211839-1,770904-3,770904-6,208480-3,224155-1,208480-1,796274-1,2047793-1,213651-1,66425-8,66741-6,66741-5,66741-8,66425-7,1445824-3,66741-7,66741-2,1445824-1,66741-1,1-66563-1,208471-1,200336-14,2217000,213588-2,66109-4,66109-3,796450-1,1658538-2,1658538-1,66569-3,66569-2,91525-1,1658538-3,1-66598-2,1-66598-1,66741-9,2151026-□,2151847-□,1-770988-0,1546349-1,1546349-2,796276-2,66099-4,796276-1,66099-3,206518-2,5066683-7,356114-1,208493-1,1-796387-1,1-796387-2,213893-2,90249-2,91549-1,91503-1,205838-1,1-66103-8,208482-1,794058-1,794058-3,112383,205090-2,205090-1,91538-1,1445822-3,1445822-1,208680-1,208473-1,208680-2,206044-1,1977890-1,208714-2,208714-1,206429-1,66107-4,66107-3,213729-6,213729-9,66393-8,66393-7,206153-2,213827-8,206153-1,213782-4,204219-1,796112-1,164163-1,1-794058-0,211398-4,164163-2,1-770986-0,211398-2,201580-1,211398-1,200333-8,1-597-1,207774-3,66260-1,66260-2,207774-2,213925-1,2151101-[ ],207774-4,66260-4,213671-1,208131-1,206516-1,1-66683-0,796330-1,1445539-3,1445539-1,208495-1,1-66332-4,208945-5,208945-7,208945-8,91505-1,193991-4,1-66101-9,208484-3,208484-1,788159-2,207774-1,206438-1,206438-2,66429-4,1445828-1,66429-3,213847-1,213847-2,213847-3,213847-4,2266601-□,208716-1,1445817-3,208475-1,66601-2,66601-9,1445817-1,206151-4,206151-2,206151-3,1776906-1,206151-1,770985-3,1-601967-6,213780-2,770985-1,2266335-[ ],788158-2,1-601967-5,211766-1,1-7903-2,601966-1,66262-1,1-7903-1,66262-2,66262-4,206207-1,66405-4,66360-4,66360-3,601966-5,208497-1,206305-1,213812-1,1-66425-2,206403-4,206403-5,206403-2,206403-3,206403-1,19024-4,19024-3,19024-5,1-5066683-0,1977888-1,213605-1,202726-14,1-66107-1,208486-1,164160-4,1604089-1,208486-3,164160-3,1604089-2,213605-7,6-66505-2,1445828-3,213571-2,200336-6,1490076-1,1490076-2,6-66505-0,19024-2,19024-1,1445826-3,213845-1,213845-2,91519-1,1445826-1,213845-3,213845-4,213845-5,213845-6,1-796433-1,2151016-□,208477-1,1-66358-0,206425-5,208718-2,206425-2,208718-1,2151641-□,206425-1,1604196-1,796203-1,1-66358-6,1776904-1,213856-4,1-66358-9,770987-3,66253-8,213823-2,66253-6,66253-5,66253-4,1776088-1,66253-2,66253-1,1546347-1,1546347-2,211768-1,1-740-1,1-740-2,206512-6,206512-5,208488-3,206512-2,206512-1,66505-9,206062-4,206062-3,66505-4,66505-3,213810-1,207597-1,1-208223-0,788189-1,213603-2,1-66105-9,213603-1,213603-6,213603-4,213603-5,2-66102-5,206852-8,208488-1,206227-1,5019024-2,206434-1,5019024-3,5019024-4,5019024-5,788154-2,206227-2,213843-1,5019024-1,213843-2,213889-2,213843-3,213843-4,206227-6,1-796435-2,788189-2,1-770904-1,1-770904-0,66399-4,69710-1,66399-3,54123-1,213854-3,208457-3,208457-1,45536-1,66255-8,1-66601-2,66255-7,66255-6,66255-5,66255-2,66255-1,1445730-1,770834-1,770834-3,1658543-2,1658543-1,2151017-1,205842-1,1658543-3,2266380-□,1-66601-0,1-7907-1,66682-6,202508-1,66507-4,66507-3,796095-2,66682-9,54012-4,54012-3,770834-4,66682-4,206060-1,66507-9,770834-6,66102-9,66102-8,2151405-[ 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